In-situ Beam Profile Metrology

A system for determining various parameters of an ion beam is disclosed. A test workpiece may be modified to incorporate a detection pattern. The detection pattern may be configured to measure the height of the ion beam, the uniformity of the ion beam, or the central angle of the ion beam. In certai...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Anglin, Kevin R, Ruffell, Simon, Chen, Tsung-Liang
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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