TRANSPORT SYSTEM

Embodiments herein relate to a transport system and a substrate processing and transfer (SPT) system. The SPT system includes a transport system that connects two processing tools. The transport system includes a vacuum tunnel that is configured to transport substrates between the processing tools....

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	OLDENDORF, Ulrich, ASSAF, Shay, CONSTANT, Andrew J, NEWMAN, Jacob, BERGER, Alexander, AENIS, Martin, HUDGENS, Jeffrey C, WEAVER, William Tyler
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HANDLING THIN OR FILAMENTARY MATERIAL PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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