MICROELECTROMECHANICAL GYROSCOPE FOR SENSING ANGULAR RATE AND METHOD OF SENSING ANGULAR RATE
A microelectromechanical gyroscope includes: a substrate; a stator sensing structure fixed to the substrate; a first mass elastically constrained to the substrate and movable with respect to the substrate in a first direction; a second mass elastically constrained to the first mass and movable with...
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| creator | VALZASINA, Carlo FALORNI, Luca Giuseppe PRATI, Daniele BRUNETTO, Matteo Fabio |
| description | A microelectromechanical gyroscope includes: a substrate; a stator sensing structure fixed to the substrate; a first mass elastically constrained to the substrate and movable with respect to the substrate in a first direction; a second mass elastically constrained to the first mass and movable with respect to the first mass in a second direction; and a third mass elastically constrained to the second mass and to the substrate and capacitively coupled to the stator sensing structure, the third mass being movable with respect to the substrate in the second direction and with respect to the second mass in the first direction. |
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a stator sensing structure fixed to the substrate; a first mass elastically constrained to the substrate and movable with respect to the substrate in a first direction; a second mass elastically constrained to the first mass and movable with respect to the first mass in a second direction; and a third mass elastically constrained to the second mass and to the substrate and capacitively coupled to the stator sensing structure, the third mass being movable with respect to the substrate in the second direction and with respect to the second mass in the first direction.</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | GYROSCOPIC INSTRUMENTS MEASURING MEASURING DISTANCES, LEVELS OR BEARINGS NAVIGATION PHOTOGRAMMETRY OR VIDEOGRAMMETRY PHYSICS SURVEYING TESTING |
| title | MICROELECTROMECHANICAL GYROSCOPE FOR SENSING ANGULAR RATE AND METHOD OF SENSING ANGULAR RATE |
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