Apparatus and Method to Electrostatically Remove Foreign Matter from Substrate Surfaces

In one exemplary embodiment, described herein are innovative techniques for reducing the attractive force between particles and a substrate surface to aid in the removal of particles from the substrate surface. More specifically, a multi-electrode chuck is utilized to assist in cleaning a substrate....

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Simms, Ihsan, Rotondaro, Antonio Luis Pacheco, Bassett, Derek, Hurd, Trace Quentin
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CLEANING CLEANING IN GENERAL ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PERFORMING OPERATIONS PREVENTION OF FOULING IN GENERAL SEMICONDUCTOR DEVICES TRANSPORTING
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