Tiered-Profile Contact for Semiconductor

Tiered-profile contacts for semiconductor devices and techniques for formation thereof are provided In one aspect, a method for forming tiered-profile contacts to a semiconductor device includes: depositing a first oxide layer over the semiconductor device; depositing a second oxide layer on the fir...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Choi, Kisik, Cheng, Kangguo
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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