LOW ELASTICITY FILMS FOR MICROFLUIDIC USE

Microfluidic circuit elements, such as a microvalve, micropump or microvent, formed of a microcavity divided by a diaphragm web into a first subcavity bounded by a first internal wall and a second subcavity bounded by a second internal wall, where the diaphragm web is characterized as a thin film ha...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Kay, Justin L, Battrell, C. Frederick, Sprague, Isaac, Bragd, Matthew Scott
Format: Patent
Sprache:eng
Schlagworte:
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