METHODS AND APPARATUSES FOR PLASMA CHAMBER MATCHING AND FAULT IDENTIFICATION

Methods of operating and assembling a plasma chamber are disclosed. An operating method includes tuning a match network of a plasma chamber while running a non-plasma discharge recipe. A hardware impedance of the plasma chamber is calculated from the match network settings from the tuning. A match l...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	DOH, Hyun-Ho, VENUGOPAL, Vijayakumar C, GHANTASALA, Sathyendra
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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