LIGHT RECEIVING ELEMENT AND METHOD OF MANUFACTURING THE SAME

A light receiving element is obtained by: forming a first mask having a first opening and a second opening; performing etching by using the first mask, to allow the etching to progress at a higher rate in the second opening than in the first opening; forming a second mask having a third opening and...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	BALASEKARAN, Sundararajan, KIMURA, Daisuke
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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