FABRICATING PHOTONICS STRUCTURE LIGHT SIGNAL TRANSMISSION REGIONS

There is set forth herein a method including depositing a layer formed of barrier material over a conductive material formation of a photonics structure; and removing material of the layer in a light signal transmitting region of the photonics structure. In one embodiment the barrier material can in...

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Hauptverfasser: LEAKE, JR., Gerald L, COOLBAUGH, Douglas
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creator LEAKE, JR., Gerald L
COOLBAUGH, Douglas
description There is set forth herein a method including depositing a layer formed of barrier material over a conductive material formation of a photonics structure; and removing material of the layer in a light signal transmitting region of the photonics structure. In one embodiment the barrier material can include silicon carbon nitride. In one embodiment the barrier material can include silicon nitride.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
SEMICONDUCTOR DEVICES
title FABRICATING PHOTONICS STRUCTURE LIGHT SIGNAL TRANSMISSION REGIONS
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