VACUUM DEVICE AND METHOD FOR COATING COMPONENTS OF A VACUUM DEVICE

A vacuum device comprising at least one component having a portion which, during operation of the vacuum device, is in contact with a vacuum and which is coated at least in part by a layer which absorbs gas particles, in particular with a layer of a no-evaporable getter (NEG) material.

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Hauptverfasser: KRAFT, Andreas, LAUER, Thorsten
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Sprache:eng
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creator KRAFT, Andreas
LAUER, Thorsten
description A vacuum device comprising at least one component having a portion which, during operation of the vacuum device, is in contact with a vacuum and which is coated at least in part by a layer which absorbs gas particles, in particular with a layer of a no-evaporable getter (NEG) material.
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recordid cdi_epo_espacenet_US2019309408A1
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subjects BLASTING
CHEMICAL SURFACE TREATMENT
CHEMISTRY
COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
COATING MATERIAL WITH METALLIC MATERIAL
COATING METALLIC MATERIAL
DIFFUSION TREATMENT OF METALLIC MATERIAL
HEATING
INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL
LIGHTING
MECHANICAL ENGINEERING
METALLURGY
POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS
PUMPS
PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
WEAPONS
title VACUUM DEVICE AND METHOD FOR COATING COMPONENTS OF A VACUUM DEVICE
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