AMBIENT CONTROLLED TRANSFER MODULE AND PROCESS SYSTEM

Methods and apparatus for processing a substrate are provided herein. In one implementation, the apparatus includes a load lock chamber coupled to a transfer chamber. The transfer chamber is coupled to a thermal process chamber and a substrate is transferred between each of the load lock chamber, th...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ASSAF, Shay, NEWMAN, Jacob, CONSTANT, Andrew, CARLSON, Charles, HICKERSON, Stephen, WEAVER, William Tyler
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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