QUALITY MONITORING SYSTEM

A quality monitoring system according to an embodiment includes an imager, an inspector, and a processor. The imager repeatedly acquires a first image of an equipment. The equipment repeats a first operation processing a workpiece. The first image is of the equipment imaged at a first timing of the...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	YAMADA, Wataru, SAKAI, Risa
Format:	Patent
Sprache:	eng
Schlagworte:	CALCULATING COMPUTING COUNTING IMAGE DATA PROCESSING OR GENERATION, IN GENERAL PHYSICS
Online-Zugang:	Volltext bestellen
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