VERTICAL SEMICONDUCTOR DEVICE

A vertical semiconductor device including a plurality of interlayer insulating layer patterns spaced apart from each other on a substrate and stacked in a vertical direction; a plurality of conductive layer patterns arranged between the interlayer insulating layer patterns and each having a rounded...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Lee, Chang-sup, Jang, Se-mee, Kang, Chang-seok, Park, Jo-young
Format:	Patent
Sprache:	eng
Schlagworte:	ELECTRICITY
Online-Zugang:	Volltext bestellen
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