MICROELECTROMECHANICAL PIEZORESISTIVE PRESSURE SENSOR WITH SELF-TEST CAPABILITY AND CORRESPONDING MANUFACTURING PROCESS

A microelectromechanical pressure sensor includes a monolithic body of semiconductor material having a front surface. A sensing structure is integrated in the monolithic body and has a buried cavity completely contained within the monolithic body at the front surface. A sensing membrane is suspended...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Baldo, Lorenzo, Duqi, Enri
Format:	Patent
Sprache:	eng
Schlagworte:	ELECTRICITY MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PHYSICS TESTING
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