METHOD FOR MEASURING PROXIMITY EFFECT ON HIGH DENSITY MAGNETIC TUNNEL JUNCTION DEVICES IN A MAGNETIC RANDOM ACCESS MEMORY DEVICE

A method for testing individual memory elements or sets of memory elements of an array of magnetic memory elements. The method involves forming a mask such as photoresist mask over an array memory elements. The mask is configured with an opening over each of the selected memory elements to be tested...

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Hauptverfasser: Boone, Thomas D, Manandhar, Pradeep
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Manandhar, Pradeep
description A method for testing individual memory elements or sets of memory elements of an array of magnetic memory elements. The method involves forming a mask such as photoresist mask over an array memory elements. The mask is configured with an opening over each of the selected memory elements to be tested. The mask can be formed of photoresist which can be patterned by focused electron beam exposure to form opening at features sizes smaller than those available using standard photolithographic processes. An electrically conductive material is deposited over the mask and into the openings in the mask to make electrical contact with the selected memory element or memory elements to be tested. Then, electrical connection can be made with the electrically conductive material to test the selected one or more magnetic memory elements.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
INDUCTANCES
INFORMATION STORAGE
MAGNETS
PHYSICS
SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
SEMICONDUCTOR DEVICES
STATIC STORES
TRANSFORMERS
title METHOD FOR MEASURING PROXIMITY EFFECT ON HIGH DENSITY MAGNETIC TUNNEL JUNCTION DEVICES IN A MAGNETIC RANDOM ACCESS MEMORY DEVICE
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