SEMICONDUCTOR DEVICE WITH DEEP DIFFUSION REGION

A method of processing a semiconductor device, comprising: providing a semiconductor body having dopants of a first conductivity type; forming at least one trench that extends into the semiconductor body along a vertical direction, the trench being laterally confined by two trench sidewalls and vert...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	IRSIGLER, Peter, WUEBBEN, Thomas, SCHULZE, Hans-Joachim
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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