Method and Device for Measurement of a Plurality of Semiconductor Chips in a Wafer Array

A method and a device for measuring a plurality of semiconductor chips in a wafer array are disclosed. In an embodiment a method for measuring the semiconductor chips in a wafer array, wherein the wafer array is arranged on an electrically conductive carrier so that in each case back contacts of the...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Specht, Holger, Ebbecke, Jens, Vogl, Anton, Zeisel, Roland
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS SEMICONDUCTOR DEVICES TESTING
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