SIMS Spectrometry Technique

A method of performing Secondary Ion Mass Spectrometry, comprising: - Providing a specimen on a specimen holder; - Using an ion beam to irradiate a region of a surface of said specimen, thereby producing ablated specimen material; - Collecting ionized constituents of said ablated material in a mass...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	Mulders, Johannes Jacobus Lambertus
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
Online-Zugang:	Volltext bestellen
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