APPARATUS AND METHOD FOR MEASUREMENT OF MULTILAYER STRUCTURES

A method of identifying the material and determining the physical thickness of each layer in a multilayer structure is disclosed. The method includes measuring the optical thickness of each of the layers of the multilayer object as a function of wavelength of a light source and calculating a normali...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	MARCUS, Michael A, HADCOCK, Kyle J, IGNATOVICH, Filipp V, GIBSON, Donald S
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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