CORRELATION BETWEEN CONDUCTIVITY AND PH MEASUREMENTS FOR KOH TEXTURING SOLUTIONS AND ADDITIVES
The variability of an etchant concentration in an immersion processes for treatment of semiconductor devices can be significantly lowered by continuously measuring the conductivity of an etchant solution and comparing against predetermined thresholds. The etchant concentration can be maintained by a...
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| creator | Chen, Gim-Syang Rieker, Jennifer Kashkoush, Ismail Nemeth, Dennis |
| description | The variability of an etchant concentration in an immersion processes for treatment of semiconductor devices can be significantly lowered by continuously measuring the conductivity of an etchant solution and comparing against predetermined thresholds. The etchant concentration can be maintained by a feed and bleed process based on conductivity measurements of the etchant solution and the conductivity measurements being correlated with premeasured pH values of an etchant solution. |
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| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_US2019148193A1</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>US2019148193A1</sourcerecordid><originalsourceid>FETCH-epo_espacenet_US2019148193A13</originalsourceid><addsrcrecordid>eNqNjLsKwjAUQLs4iPoPF5wFYx3sGJNbE2xzJbnxsViKxEm0UP8fH_gBTmc55wyzsyLvsZJsycEa-YDoQJHTUbHdWz6BdBp2BmqUIXqs0XGAkjxsyQDjkaO3bgOBqvh5hK8vtbbvHMM4G1zbW58mP46yaYmszCx1jyb1XXtJ9_RsYljMRSGWK1HkUuT_WS84RjRt</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>CORRELATION BETWEEN CONDUCTIVITY AND PH MEASUREMENTS FOR KOH TEXTURING SOLUTIONS AND ADDITIVES</title><source>esp@cenet</source><creator>Chen, Gim-Syang ; Rieker, Jennifer ; Kashkoush, Ismail ; Nemeth, Dennis</creator><creatorcontrib>Chen, Gim-Syang ; Rieker, Jennifer ; Kashkoush, Ismail ; Nemeth, Dennis</creatorcontrib><description>The variability of an etchant concentration in an immersion processes for treatment of semiconductor devices can be significantly lowered by continuously measuring the conductivity of an etchant solution and comparing against predetermined thresholds. The etchant concentration can be maintained by a feed and bleed process based on conductivity measurements of the etchant solution and the conductivity measurements being correlated with premeasured pH values of an etchant solution.</description><language>eng</language><subject>BASIC ELECTRIC ELEMENTS ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC ; GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS ; REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGYGENERATION, TRANSMISSION OR DISTRIBUTION ; SEMICONDUCTOR DEVICES ; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS ; TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINSTCLIMATE CHANGE</subject><creationdate>2019</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20190516&DB=EPODOC&CC=US&NR=2019148193A1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20190516&DB=EPODOC&CC=US&NR=2019148193A1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>Chen, Gim-Syang</creatorcontrib><creatorcontrib>Rieker, Jennifer</creatorcontrib><creatorcontrib>Kashkoush, Ismail</creatorcontrib><creatorcontrib>Nemeth, Dennis</creatorcontrib><title>CORRELATION BETWEEN CONDUCTIVITY AND PH MEASUREMENTS FOR KOH TEXTURING SOLUTIONS AND ADDITIVES</title><description>The variability of an etchant concentration in an immersion processes for treatment of semiconductor devices can be significantly lowered by continuously measuring the conductivity of an etchant solution and comparing against predetermined thresholds. The etchant concentration can be maintained by a feed and bleed process based on conductivity measurements of the etchant solution and the conductivity measurements being correlated with premeasured pH values of an etchant solution.</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC</subject><subject>GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS</subject><subject>REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGYGENERATION, TRANSMISSION OR DISTRIBUTION</subject><subject>SEMICONDUCTOR DEVICES</subject><subject>TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS</subject><subject>TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINSTCLIMATE CHANGE</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2019</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNqNjLsKwjAUQLs4iPoPF5wFYx3sGJNbE2xzJbnxsViKxEm0UP8fH_gBTmc55wyzsyLvsZJsycEa-YDoQJHTUbHdWz6BdBp2BmqUIXqs0XGAkjxsyQDjkaO3bgOBqvh5hK8vtbbvHMM4G1zbW58mP46yaYmszCx1jyb1XXtJ9_RsYljMRSGWK1HkUuT_WS84RjRt</recordid><startdate>20190516</startdate><enddate>20190516</enddate><creator>Chen, Gim-Syang</creator><creator>Rieker, Jennifer</creator><creator>Kashkoush, Ismail</creator><creator>Nemeth, Dennis</creator><scope>EVB</scope></search><sort><creationdate>20190516</creationdate><title>CORRELATION BETWEEN CONDUCTIVITY AND PH MEASUREMENTS FOR KOH TEXTURING SOLUTIONS AND ADDITIVES</title><author>Chen, Gim-Syang ; Rieker, Jennifer ; Kashkoush, Ismail ; Nemeth, Dennis</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_US2019148193A13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2019</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC</topic><topic>GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS</topic><topic>REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGYGENERATION, TRANSMISSION OR DISTRIBUTION</topic><topic>SEMICONDUCTOR DEVICES</topic><topic>TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS</topic><topic>TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINSTCLIMATE CHANGE</topic><toplevel>online_resources</toplevel><creatorcontrib>Chen, Gim-Syang</creatorcontrib><creatorcontrib>Rieker, Jennifer</creatorcontrib><creatorcontrib>Kashkoush, Ismail</creatorcontrib><creatorcontrib>Nemeth, Dennis</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Chen, Gim-Syang</au><au>Rieker, Jennifer</au><au>Kashkoush, Ismail</au><au>Nemeth, Dennis</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>CORRELATION BETWEEN CONDUCTIVITY AND PH MEASUREMENTS FOR KOH TEXTURING SOLUTIONS AND ADDITIVES</title><date>2019-05-16</date><risdate>2019</risdate><abstract>The variability of an etchant concentration in an immersion processes for treatment of semiconductor devices can be significantly lowered by continuously measuring the conductivity of an etchant solution and comparing against predetermined thresholds. The etchant concentration can be maintained by a feed and bleed process based on conductivity measurements of the etchant solution and the conductivity measurements being correlated with premeasured pH values of an etchant solution.</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGYGENERATION, TRANSMISSION OR DISTRIBUTION SEMICONDUCTOR DEVICES TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINSTCLIMATE CHANGE |
| title | CORRELATION BETWEEN CONDUCTIVITY AND PH MEASUREMENTS FOR KOH TEXTURING SOLUTIONS AND ADDITIVES |
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