SEMICONDUCTOR DEVICE AND METHOD FOR FORMING N-TYPE CONDUCTIVE CHANNEL IN DIAMOND USING HETEROJUNCTION

The present application discloses a semiconductor device and a method for forming an n-type conductive channel in a diamond using a heterojunction, which pertain to the technical field of fabrication of semiconductor devices. The method comprises: forming a diamond layer on a substrate; and depositi...

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Bibliographische Detailangaben

Hauptverfasser:	Feng, Zhihong, Zhou, Chuangjie, Yu, Cui, Liu, Qingbin, He, Zezhao, Wang, Jingjing
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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