METHOD OF ELECTROPLATING METAL INTO RECESSED FEATURE AND ELECTROPLATING LAYER IN RECESSED FEATURE
A method of electroplating a metal into a recessed feature is provided, which includes: contacting a surface of the recessed feature with an electroplating solution comprising metal ions, an accelerator additive, a suppressor additive and a leveler additive, in which the recessed feature has at leas...
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| creator | Jangjian, Shiu-Ko Wang, Yu-Sheng Peng, Yu-Ren Hung, Chi-Cheng Wu, Jyun-Ru NIAN, Jun-Nan |
| description | A method of electroplating a metal into a recessed feature is provided, which includes: contacting a surface of the recessed feature with an electroplating solution comprising metal ions, an accelerator additive, a suppressor additive and a leveler additive, in which the recessed feature has at least two elongated regions and a cross region laterally between the two elongated regions, and a molar concentration ratio of the accelerator additive: the suppressor additive: the leveler additive is (8-15):(1.5-3):(0.5-2); and electroplating the metal to form an electroplating layer in the recessed feature. An electroplating layer in a recessed feature is also provided. |
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An electroplating layer in a recessed feature is also provided.</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | APPARATUS THEREFOR BASIC ELECTRIC ELEMENTS CHEMISTRY CONVERSION OR DISTRIBUTION OF ELECTRIC POWER CURRENT COLLECTORS ELECTRICITY ELECTROFORMING ELECTROLYTIC OR ELECTROPHORETIC PROCESSES GENERATION INSTALLATION OF ELECTRIC CABLES OR LINES, OR OF COMBINEDOPTICAL AND ELECTRIC CABLES OR LINES LINE CONNECTORS METALLURGY PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTIONOF COATINGS |
| title | METHOD OF ELECTROPLATING METAL INTO RECESSED FEATURE AND ELECTROPLATING LAYER IN RECESSED FEATURE |
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