Acoustic Resonator with Optimized Outer Perimeter

Example implementations of a bulk acoustic wave resonator with an optimized outer perimeter are disclosed. In an example aspect, a resonator includes a truncated-ellipsoid-shaped active region. The active region includes an outer electrode disposed as a first layer of the active region. The active l...

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Bibliographische Detailangaben
Hauptverfasser: Pollard, Thomas Bain, Menendez-Nadal, Oscar, Fisher, Brian Hal, Nath, Janardan
Format: Patent
Sprache:eng
Schlagworte:
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