Acoustic Resonator with Optimized Outer Perimeter

Example implementations of a bulk acoustic wave resonator with an optimized outer perimeter are disclosed. In an example aspect, a resonator includes a truncated-ellipsoid-shaped active region. The active region includes an outer electrode disposed as a first layer of the active region. The active l...

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Hauptverfasser: Pollard, Thomas Bain, Menendez-Nadal, Oscar, Fisher, Brian Hal, Nath, Janardan
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creator Pollard, Thomas Bain
Menendez-Nadal, Oscar
Fisher, Brian Hal
Nath, Janardan
description Example implementations of a bulk acoustic wave resonator with an optimized outer perimeter are disclosed. In an example aspect, a resonator includes a truncated-ellipsoid-shaped active region. The active region includes an outer electrode disposed as a first layer of the active region. The active layer also includes a piezoelectric layer disposed as a second layer of the active region with the piezoelectric layer disposed interior to the outer electrode. The active layer further includes an inner electrode disposed as a third layer of the active region with the inner electrode disposed interior to the piezoelectric layer.
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subjects BASIC ELECTRONIC CIRCUITRY
ELECTRICITY
IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
RESONATORS
title Acoustic Resonator with Optimized Outer Perimeter
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