MEMS DUAL SUBSTRATE SWITCH WITH MAGNETIC ACTUATION

Systems and methods for forming a magnetostatic MEMS switch include forming a movable beam on a first substrate, forming the electrical contacts on a second substrate, and coupling the two substrates using a hermetic seal. A shunt bar on the movable plate may close the switch when lowered onto the c...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: GUDEMAN, Christopher S, SIGURDSON, Marin
Format: Patent
Sprache:eng
Schlagworte:
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