SEMICONDUCTOR STRUCTURE AND METHOD FOR FABRICATING THE SAME

A semiconductor structure includes a conductive feature on a substrate. A plurality of first dielectric layers are disposed on the conductive feature, and stress directions of at least two of the first dielectric layers are different from one another. A first hole penetrates through the plurality of...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	YANG, Hsiao-Ying, HSIA, Wei-Lun, LIN, Chun-Hsien
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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