Sample Holder, Ion Milling Apparatus, Sample Processing Method, Sample Observing Method, and Sample Processing and Observing Method

The present invention is directed to a side entry type sample holder which enables observation with an observation apparatus without removing the sample to be analyzed from the sample holder after processing the sample to be analyzed by a processing apparatus. The sample holder includes a grip, a sa...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: TAKASU, Hisayuki, KAMINO, Atsushi
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:The present invention is directed to a side entry type sample holder which enables observation with an observation apparatus without removing the sample to be analyzed from the sample holder after processing the sample to be analyzed by a processing apparatus. The sample holder includes a grip, a sample holder main body extending from the grip, a tip portion which is connected to the sample holder main body and provided with a sample table for fixing a sample, and a mechanism which changes a relative positional relationship between a processing surface of the sample fixed to the sample table and an irradiation direction of an ion beam, and causes the tip portion to avoid irradiation with the ion beam during sample processing.