METHOD OF IDENTIFYING AND TRACKING ROLL TO ROLL POLISHING PAD MATERIALS DURING PROCESSING
Implementations described herein generally relate to methods and apparatus for polishing substrates, more particularly, to methods and apparatus for identifying and/or tracking polishing material in a roll-to-roll polishing system. In one implementation, a method of polishing a substrate is provided...
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| creator | GURUSAMY, Jay KAN, Wai- Ming OH, Jeonghoon LISCHKA, David J TOLLES, Robert D RONDUM, Erik ZUNIGA, Steven M REEDY, Steven M |
| description | Implementations described herein generally relate to methods and apparatus for polishing substrates, more particularly, to methods and apparatus for identifying and/or tracking polishing material in a roll-to-roll polishing system. In one implementation, a method of polishing a substrate is provided. The method comprises advancing a polishing material across a surface of a platen. The polishing material has a polishing surface and an opposing backside surface and the backside surface has a pattern of identifying features formed thereon. The method further comprises sensing the movement of the pattern of identifying features past a detector assembly. The method further comprises controlling a position of the polishing material relative to the platen based on data received from the sensed movement of the pattern of identifying features. |
| format | Patent |
| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_US2019030677A1</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>US2019030677A1</sourcerecordid><originalsourceid>FETCH-epo_espacenet_US2019030677A13</originalsourceid><addsrcrecordid>eNrjZIj0dQ3x8HdR8HdT8HRx9QvxdIv09HNXcPRzUQgJcnT2BnGC_H18FEL8IXSAv49nsAdIOMDRRcHXMcQ1yNPRJ1jBJTQILBjk7-waHAxk8jCwpiXmFKfyQmluBmU31xBnD93Ugvz41OKCxOTUvNSS-NBgIwNDSwNjAzNzc0dDY-JUAQDaUDJv</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>METHOD OF IDENTIFYING AND TRACKING ROLL TO ROLL POLISHING PAD MATERIALS DURING PROCESSING</title><source>esp@cenet</source><creator>GURUSAMY, Jay ; KAN, Wai- Ming ; OH, Jeonghoon ; LISCHKA, David J ; TOLLES, Robert D ; RONDUM, Erik ; ZUNIGA, Steven M ; REEDY, Steven M</creator><creatorcontrib>GURUSAMY, Jay ; KAN, Wai- Ming ; OH, Jeonghoon ; LISCHKA, David J ; TOLLES, Robert D ; RONDUM, Erik ; ZUNIGA, Steven M ; REEDY, Steven M</creatorcontrib><description>Implementations described herein generally relate to methods and apparatus for polishing substrates, more particularly, to methods and apparatus for identifying and/or tracking polishing material in a roll-to-roll polishing system. In one implementation, a method of polishing a substrate is provided. The method comprises advancing a polishing material across a surface of a platen. The polishing material has a polishing surface and an opposing backside surface and the backside surface has a pattern of identifying features formed thereon. The method further comprises sensing the movement of the pattern of identifying features past a detector assembly. The method further comprises controlling a position of the polishing material relative to the platen based on data received from the sensed movement of the pattern of identifying features.</description><language>eng</language><subject>DRESSING OR CONDITIONING OF ABRADING SURFACES ; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS ; GRINDING ; MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING ; PERFORMING OPERATIONS ; POLISHING ; TRANSPORTING</subject><creationdate>2019</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20190131&DB=EPODOC&CC=US&NR=2019030677A1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,778,883,25547,76298</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20190131&DB=EPODOC&CC=US&NR=2019030677A1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>GURUSAMY, Jay</creatorcontrib><creatorcontrib>KAN, Wai- Ming</creatorcontrib><creatorcontrib>OH, Jeonghoon</creatorcontrib><creatorcontrib>LISCHKA, David J</creatorcontrib><creatorcontrib>TOLLES, Robert D</creatorcontrib><creatorcontrib>RONDUM, Erik</creatorcontrib><creatorcontrib>ZUNIGA, Steven M</creatorcontrib><creatorcontrib>REEDY, Steven M</creatorcontrib><title>METHOD OF IDENTIFYING AND TRACKING ROLL TO ROLL POLISHING PAD MATERIALS DURING PROCESSING</title><description>Implementations described herein generally relate to methods and apparatus for polishing substrates, more particularly, to methods and apparatus for identifying and/or tracking polishing material in a roll-to-roll polishing system. In one implementation, a method of polishing a substrate is provided. The method comprises advancing a polishing material across a surface of a platen. The polishing material has a polishing surface and an opposing backside surface and the backside surface has a pattern of identifying features formed thereon. The method further comprises sensing the movement of the pattern of identifying features past a detector assembly. The method further comprises controlling a position of the polishing material relative to the platen based on data received from the sensed movement of the pattern of identifying features.</description><subject>DRESSING OR CONDITIONING OF ABRADING SURFACES</subject><subject>FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS</subject><subject>GRINDING</subject><subject>MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING</subject><subject>PERFORMING OPERATIONS</subject><subject>POLISHING</subject><subject>TRANSPORTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2019</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZIj0dQ3x8HdR8HdT8HRx9QvxdIv09HNXcPRzUQgJcnT2BnGC_H18FEL8IXSAv49nsAdIOMDRRcHXMcQ1yNPRJ1jBJTQILBjk7-waHAxk8jCwpiXmFKfyQmluBmU31xBnD93Ugvz41OKCxOTUvNSS-NBgIwNDSwNjAzNzc0dDY-JUAQDaUDJv</recordid><startdate>20190131</startdate><enddate>20190131</enddate><creator>GURUSAMY, Jay</creator><creator>KAN, Wai- Ming</creator><creator>OH, Jeonghoon</creator><creator>LISCHKA, David J</creator><creator>TOLLES, Robert D</creator><creator>RONDUM, Erik</creator><creator>ZUNIGA, Steven M</creator><creator>REEDY, Steven M</creator><scope>EVB</scope></search><sort><creationdate>20190131</creationdate><title>METHOD OF IDENTIFYING AND TRACKING ROLL TO ROLL POLISHING PAD MATERIALS DURING PROCESSING</title><author>GURUSAMY, Jay ; KAN, Wai- Ming ; OH, Jeonghoon ; LISCHKA, David J ; TOLLES, Robert D ; RONDUM, Erik ; ZUNIGA, Steven M ; REEDY, Steven M</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_US2019030677A13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2019</creationdate><topic>DRESSING OR CONDITIONING OF ABRADING SURFACES</topic><topic>FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS</topic><topic>GRINDING</topic><topic>MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING</topic><topic>PERFORMING OPERATIONS</topic><topic>POLISHING</topic><topic>TRANSPORTING</topic><toplevel>online_resources</toplevel><creatorcontrib>GURUSAMY, Jay</creatorcontrib><creatorcontrib>KAN, Wai- Ming</creatorcontrib><creatorcontrib>OH, Jeonghoon</creatorcontrib><creatorcontrib>LISCHKA, David J</creatorcontrib><creatorcontrib>TOLLES, Robert D</creatorcontrib><creatorcontrib>RONDUM, Erik</creatorcontrib><creatorcontrib>ZUNIGA, Steven M</creatorcontrib><creatorcontrib>REEDY, Steven M</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>GURUSAMY, Jay</au><au>KAN, Wai- Ming</au><au>OH, Jeonghoon</au><au>LISCHKA, David J</au><au>TOLLES, Robert D</au><au>RONDUM, Erik</au><au>ZUNIGA, Steven M</au><au>REEDY, Steven M</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>METHOD OF IDENTIFYING AND TRACKING ROLL TO ROLL POLISHING PAD MATERIALS DURING PROCESSING</title><date>2019-01-31</date><risdate>2019</risdate><abstract>Implementations described herein generally relate to methods and apparatus for polishing substrates, more particularly, to methods and apparatus for identifying and/or tracking polishing material in a roll-to-roll polishing system. In one implementation, a method of polishing a substrate is provided. The method comprises advancing a polishing material across a surface of a platen. The polishing material has a polishing surface and an opposing backside surface and the backside surface has a pattern of identifying features formed thereon. The method further comprises sensing the movement of the pattern of identifying features past a detector assembly. The method further comprises controlling a position of the polishing material relative to the platen based on data received from the sensed movement of the pattern of identifying features.</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | DRESSING OR CONDITIONING OF ABRADING SURFACES FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING PERFORMING OPERATIONS POLISHING TRANSPORTING |
| title | METHOD OF IDENTIFYING AND TRACKING ROLL TO ROLL POLISHING PAD MATERIALS DURING PROCESSING |
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