SENSOR ELEMENT HAVING LASER-ACTIVATED GETTER MATERIAL
A method for producing a micromechanical component having a substrate and cap, which is connected to the substrate and encloses a first cavity therewith. A first pressure prevails in the first cavity, and a first gas mixture having a first chemical composition is enclosed, and an access opening is p...
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| creator | Ametowobla, Mawuli Breitling, Achim |
| description | A method for producing a micromechanical component having a substrate and cap, which is connected to the substrate and encloses a first cavity therewith. A first pressure prevails in the first cavity, and a first gas mixture having a first chemical composition is enclosed, and an access opening is provided in the substrate or cap, which connects the first cavity to an environment of the micromechanical component, and then the first pressure and/or the first chemical composition is adjusted in the first cavity, and finally, the access opening is sealed with a laser by introducing energy/heat into an absorbing part of the substrate or cap, and a getter, introduced into the first cavity prior to the third task, is sealed with the laser radiation, and a getter, introduced into the first cavity prior to the third task, is activated at least partially with the laser radiation, during the third task. |
| format | Patent |
| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_US2018362337A1</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>US2018362337A1</sourcerecordid><originalsourceid>FETCH-epo_espacenet_US2018362337A13</originalsourceid><addsrcrecordid>eNrjZDANdvUL9g9ScPVx9XX1C1HwcAzz9HNX8HEMdg3SdXQO8QxzDHF1UXB3DQlxDVLwBXKCPB19eBhY0xJzilN5oTQ3g7Kba4izh25qQX58anFBYnJqXmpJfGiwkYGhhbGZkbGxuaOhMXGqAJSUKKo</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>SENSOR ELEMENT HAVING LASER-ACTIVATED GETTER MATERIAL</title><source>esp@cenet</source><creator>Ametowobla, Mawuli ; Breitling, Achim</creator><creatorcontrib>Ametowobla, Mawuli ; Breitling, Achim</creatorcontrib><description>A method for producing a micromechanical component having a substrate and cap, which is connected to the substrate and encloses a first cavity therewith. A first pressure prevails in the first cavity, and a first gas mixture having a first chemical composition is enclosed, and an access opening is provided in the substrate or cap, which connects the first cavity to an environment of the micromechanical component, and then the first pressure and/or the first chemical composition is adjusted in the first cavity, and finally, the access opening is sealed with a laser by introducing energy/heat into an absorbing part of the substrate or cap, and a getter, introduced into the first cavity prior to the third task, is sealed with the laser radiation, and a getter, introduced into the first cavity prior to the third task, is activated at least partially with the laser radiation, during the third task.</description><language>eng</language><subject>INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT ; MEASURING ; MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK ; MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES ; MICROSTRUCTURAL TECHNOLOGY ; PERFORMING OPERATIONS ; PHYSICS ; PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS ; TESTING ; TRANSPORTING</subject><creationdate>2018</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20181220&DB=EPODOC&CC=US&NR=2018362337A1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20181220&DB=EPODOC&CC=US&NR=2018362337A1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>Ametowobla, Mawuli</creatorcontrib><creatorcontrib>Breitling, Achim</creatorcontrib><title>SENSOR ELEMENT HAVING LASER-ACTIVATED GETTER MATERIAL</title><description>A method for producing a micromechanical component having a substrate and cap, which is connected to the substrate and encloses a first cavity therewith. A first pressure prevails in the first cavity, and a first gas mixture having a first chemical composition is enclosed, and an access opening is provided in the substrate or cap, which connects the first cavity to an environment of the micromechanical component, and then the first pressure and/or the first chemical composition is adjusted in the first cavity, and finally, the access opening is sealed with a laser by introducing energy/heat into an absorbing part of the substrate or cap, and a getter, introduced into the first cavity prior to the third task, is sealed with the laser radiation, and a getter, introduced into the first cavity prior to the third task, is activated at least partially with the laser radiation, during the third task.</description><subject>INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT</subject><subject>MEASURING</subject><subject>MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK</subject><subject>MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES</subject><subject>MICROSTRUCTURAL TECHNOLOGY</subject><subject>PERFORMING OPERATIONS</subject><subject>PHYSICS</subject><subject>PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS</subject><subject>TESTING</subject><subject>TRANSPORTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2018</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZDANdvUL9g9ScPVx9XX1C1HwcAzz9HNX8HEMdg3SdXQO8QxzDHF1UXB3DQlxDVLwBXKCPB19eBhY0xJzilN5oTQ3g7Kba4izh25qQX58anFBYnJqXmpJfGiwkYGhhbGZkbGxuaOhMXGqAJSUKKo</recordid><startdate>20181220</startdate><enddate>20181220</enddate><creator>Ametowobla, Mawuli</creator><creator>Breitling, Achim</creator><scope>EVB</scope></search><sort><creationdate>20181220</creationdate><title>SENSOR ELEMENT HAVING LASER-ACTIVATED GETTER MATERIAL</title><author>Ametowobla, Mawuli ; Breitling, Achim</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_US2018362337A13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2018</creationdate><topic>INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT</topic><topic>MEASURING</topic><topic>MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK</topic><topic>MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES</topic><topic>MICROSTRUCTURAL TECHNOLOGY</topic><topic>PERFORMING OPERATIONS</topic><topic>PHYSICS</topic><topic>PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS</topic><topic>TESTING</topic><topic>TRANSPORTING</topic><toplevel>online_resources</toplevel><creatorcontrib>Ametowobla, Mawuli</creatorcontrib><creatorcontrib>Breitling, Achim</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Ametowobla, Mawuli</au><au>Breitling, Achim</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>SENSOR ELEMENT HAVING LASER-ACTIVATED GETTER MATERIAL</title><date>2018-12-20</date><risdate>2018</risdate><abstract>A method for producing a micromechanical component having a substrate and cap, which is connected to the substrate and encloses a first cavity therewith. A first pressure prevails in the first cavity, and a first gas mixture having a first chemical composition is enclosed, and an access opening is provided in the substrate or cap, which connects the first cavity to an environment of the micromechanical component, and then the first pressure and/or the first chemical composition is adjusted in the first cavity, and finally, the access opening is sealed with a laser by introducing energy/heat into an absorbing part of the substrate or cap, and a getter, introduced into the first cavity prior to the third task, is sealed with the laser radiation, and a getter, introduced into the first cavity prior to the third task, is activated at least partially with the laser radiation, during the third task.</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT MEASURING MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PHYSICS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS TESTING TRANSPORTING |
| title | SENSOR ELEMENT HAVING LASER-ACTIVATED GETTER MATERIAL |
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