EQUIPMENT FRONT END MODULE GAS RECIRCULATION
Disclosed are methods and apparatuses for recirculating gas in an equipment front end module ("EFEM"), including the ability to provide a gas during recirculation and control the gas flow, pressure, and composition of the environment in the EFEM during recirculation.
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| creator | Aguilar Amaya, Silvia Rocio Senn, Brandon Lee Wong, Scott Vernon Gould, Richard Howard Keller, James Donald Lopes, Todd Anthony Pracko, Steven Edmund Wassei, Peter R |
| description | Disclosed are methods and apparatuses for recirculating gas in an equipment front end module ("EFEM"), including the ability to provide a gas during recirculation and control the gas flow, pressure, and composition of the environment in the EFEM during recirculation. |
| format | Patent |
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| subjects | BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES |
| title | EQUIPMENT FRONT END MODULE GAS RECIRCULATION |
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