APPARATUS FOR COLLECTION AND SUBSEQUENT REACTION OF LIQUID AND SOLID EFFLUENT INTO GASEOUS EFFLUENT

Embodiments disclosed herein include an abatement system for abating compounds produced in semiconductor processes. The abatement system includes an exhaust cooling apparatus located downstream of a plasma source. The exhaust cooling apparatus includes a plate and a cooling plate disposed downstream...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	DOWNEY, Ryan T, L'HEUREUX, James, HOU, David Muquing, ROZENZON, Yan
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL SEMICONDUCTOR DEVICES SEPARATION TRANSPORTING
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