LIQUID PROCESSING APPARATUS

A liquid processing apparatus includes a processing unit, a first supply route, a first device, a second supply route, a second device, a housing, and an external housing. The processing unit processes a substrate by using processing liquid including first and second processing liquids. The first su...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Umeno, Shinichi, Takaki, Yasuhiro, Iriyama, Tetsurou, Satoh, Takami
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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