CRACK STOP WITH OVERLAPPING VIAS

A crack stop structure for an integrated circuit (IC) structure is disclosed. The structure can include: a first crack stop pillar laterally separated from a second crack stop pillar within an insulator region of the IC structure. The first crack stop pillar can include an overlapping via in contact...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Boyd, Kevin M, Polomoff, Nicholas A, Augur, Roderick A, Trewhella, Jeannine M, Fox, III, Robert J
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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