Method of Manufacturing Semiconductor Device

A method of manufacturing a semiconductor device by performing a process on a substrate includes: forming a protective layer made of a polymer having a urea bond by supplying a raw material for polymerization to a surface of a substrate on which a protected film to be protected is formed; forming a...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	FUJIKAWA, Makoto, NOZAWA, Syuji, NIINO, Reiji, HASHIMOTO, Hiroyuki, YAMAGUCHI, Tatsuya
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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