MICROELECTROMECHANICAL SCALABLE BULK-TYPE PIEZORESISTIVE FORCE/PRESSURE SENSOR

A microelectromechanical force/pressure sensor has: a sensor die, of semiconductor material, having a front surface and a bottom surface, extending in a horizontal plane, and made of a compact bulk region having a thickness along a vertical direction, transverse to the horizontal plane; piezoresisti...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	CALTABIANO, Daniele, ROSELLI, Giuditta, PICCO, Andrea, BRAGHIN, Francesco, POMARICO, Anna Angela, ABBASI GAVARTI, Mohammad
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRICITY MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PHYSICS RESISTORS TESTING
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