Activation Of Wafer Particle Defects For Spectroscopic Composition Analysis

Methods and systems for detecting a particle defect on a wafer surface, transforming the particle to a spectroscopically active state, and identifying a material composition of the activated particle by a spectroscopic technique are described herein. Particle defects are transformed by chemical trea...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	Haller, Kurt L
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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