METHOD FOR PRODUCING SILICON SINGLE CRYSTALS

A method for producing a plurality of silicon single crystals using a single quartz crucible by repeating a step of heating a silicon material charged in the quartz crucible within a chamber and a step of pulling a silicon single crystal from the silicon melt in the quartz crucible includes a first...

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Bibliographische Detailangaben
Hauptverfasser: KAJIWARA, Kaoru, KANEHARA, Takahiro, TANAKA, Hideki, KATANO, Tomokazu, SAITO, Yasuhiro, TANABE, Kazumi
Format: Patent
Sprache:eng
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