INSPECTION SUPPORT APPARATUS AND CONTROL METHOD THEREOF, INSPECTION SYSTEM, AND CONTROL PROGRAM

A storage unit stores a defect correlation table indicating what influence a given type of defect will have on the inspection of the other types of defects. When an obtainment unit obtains an inspection result of inspecting for a defect, an influence determination unit refers to the defect correlati...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	NAKAI, Takuya, FUNAMOTO, Akihiro, TOMITA, Kohei, TAKEUCHI, Tsuyoshi, SANO, Akihiko
Format:	Patent
Sprache:	eng
Schlagworte:	CONVERSION OR DISTRIBUTION OF ELECTRIC POWER ELECTRICITY GENERATION GENERATION OF ELECTRIC POWER BY CONVERSION OF INFRA-REDRADIATION, VISIBLE LIGHT OR ULTRAVIOLET LIGHT, E.G. USINGPHOTOVOLTAIC [PV] MODULES
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