DIRECT BONDING METHOD

The method is carried out of a first substrate having a first layer made of a first material with a second substrate having a second layer made of a second material, the first material and the second material being of different natures and selected from alloys of elements of columns III and V, the m...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: TAUZIN, Aurélie, IMBERT, Bruno
Format: Patent
Sprache:eng
Schlagworte:
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