SUBSTRATE CARRIER TRANSPORT, SORTING AND LOADING/UNLOADING

SUBSTRATE CARRIER TRANSPORT, SORTING AND LOADING/UNLOADING

A substrate stocker system includes a high-density storage chamber that comprises one or more stacks of one or more substrates in a closed position, one or more substrates being supported on a respective carrier, one or more low density containers, wherein each low density container being configured...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Wohanka, Christian, Fenner, Yves, Fiddes, John, Dovids, Gerhard, Rahrbach, Bernd
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
CHAMBERS PROVIDED WITH MANIPULATION DEVICES
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
HAND TOOLS
MANIPULATORS
PERFORMING OPERATIONS
PORTABLE POWER-DRIVEN TOOLS
SEMICONDUCTOR DEVICES
TRANSPORTING
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Beschreibung
Zusammenfassung:A substrate stocker system includes a high-density storage chamber that comprises one or more stacks of one or more substrates in a closed position, one or more substrates being supported on a respective carrier, one or more low density containers, wherein each low density container being configured to store one or more substrates in an open position. The substrate stocker system further includes a first robot configured to move the one or more stacks between the high density storage chamber, and the one or more opener stations, and a second robot configured to move the individual one or more substrates between the one or more opener stations and the one or more low density containers.