METHOD, APPARATUS, AND SYSTEM FOR IMPROVED MEMORY CELL DESIGN HAVING UNIDIRECTIONAL LAYOUT USING SELF-ALIGNED DOUBLE PATTERNING

At least one method, apparatus and system disclosed involves an integrated circuit comprising a unidirectional metal layout. A first set of metal features are formed in a vertical configuration in a first metal layer of a memory cell. A second set of metal features are formed in a unidirectional hor...

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Hauptverfasser: Kim Juhan, Rashed Mahbub
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Rashed Mahbub
description At least one method, apparatus and system disclosed involves an integrated circuit comprising a unidirectional metal layout. A first set of metal features are formed in a vertical configuration in a first metal layer of a memory cell. A second set of metal features are formed in a unidirectional horizontal configuration in a second metal layer of the memory cell. A third set of metal features are formed in the unidirectional horizontal configuration in a second metal layer of a functional cell for providing routing compatibility between the memory cell and the functional cell. The memory cell is placed adjacent to the functional cell for forming an integrated circuit device.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title METHOD, APPARATUS, AND SYSTEM FOR IMPROVED MEMORY CELL DESIGN HAVING UNIDIRECTIONAL LAYOUT USING SELF-ALIGNED DOUBLE PATTERNING
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