Semiconductor Device Including a Dielectric Layer

A semiconductor device including a dielectric layer is provided. The semiconductor device includes a stack structure, and a vertical structure within the stack structure. The vertical structure includes a lower region having a first width and an upper region having a second width, greater than the f...

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Bibliographische Detailangaben
Hauptverfasser: Kim Young Wan, Jang Byong Hyun, Kim Jung Ho, Kim Bio, Son Young Seon, Ahn Jae Young, Choi Eun Yeoung
Format: Patent
Sprache:eng
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