MICROELECTROMECHANICAL DEVICE AND A METHOD OF DAMPING A MASS THEREOF

A microelectromechanical device comprising a mass, an electromechanical transducer configured to convert, after damping the mass during a first damping period, displacement of the mass in the first and second directions into corresponding first and second electrical signals during corresponding firs...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Cassagnes Thierry Dominique Yves, Bernal Olivier, Tap Helene Catherine Louise, Ciotirca Lavinia Elena, Enjalbert Jerome Romain
Format:	Patent
Sprache:	eng
Schlagworte:	INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT MEASURING MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK PHYSICS TESTING
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