APPARATUS AND METHOD FOR PROGRAMMABLE SPATIALLY SELECTIVE NANOSCALE SURFACE FUNCTIONALIZATION

A spatially selective surface functionalization device configured to generate a pattern of micro plasmas and functionalize a substrate surface may include: a pattern management system, a patterning head, and a gas delivery system, wherein the gas delivery system provides a primed gas mixture for for...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Khalid Waqas, Saleh Faisal, Saleh Nedal
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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