Advanced Moisture Resistant Structure of Compound Semiconductor Integrated Circuits

An advanced moisture resistant structure of compound semiconductor integrated circuit comprises a compound semiconductor substrate, a compound semiconductor epitaxial structure, a compound semiconductor integrated circuit and a moisture barrier layer. The compound semiconductor epitaxial structure i...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Shao Winson, Hua Chang Hwang
Format: Patent
Sprache:eng
Schlagworte:
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