Method of Fabricating Semiconductor Device Isolation Structure

A semiconductor device including reentrant isolation structures and a method for making such a device. A preferred embodiment comprises a substrate of semiconductor material forming at least one isolation structure having a reentrant profile and isolating one or more adjacent operational components....

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Yeh Chen-Nan, Fu Chu-Yun, Yu Chen-Hua, Chen Ding-Yuan
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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