Processing Apparatus

A processing apparatus includes a central control unit, and a processing quality prediction unit, a processing unit, and a tool compensation unit which are respectively connected with the central control unit electrically. The processing quality prediction unit implements a virtual processing qualit...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Yang Haw Ching, Tieng Hao, Hou Hsin Hong, SU PO CHENG, Cheng Fan Tien
Format:	Patent
Sprache:	eng
Schlagworte:	CONTROL OR REGULATING SYSTEMS IN GENERAL CONTROLLING FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS PHYSICS REGULATING
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