CAPACITIVE FORCE SENSOR

CAPACITIVE FORCE SENSOR

A capacitive force sensor includes a base body, a diaphragm body, two spacers arranged between the base body and the diaphragm body, the two spacers supporting the diaphragm body on the base body, a free end formed by the diaphragm body projecting beyond one of the two spacers, a cavity formed betwe...

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Hauptverfasser: DUENNINGER JOHANNES, SCHULTHEIS THILO
Format: Patent
Sprache:eng
Schlagworte:
MEASURING
MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE
PHYSICS
TESTING
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creator DUENNINGER JOHANNES
SCHULTHEIS THILO
description A capacitive force sensor includes a base body, a diaphragm body, two spacers arranged between the base body and the diaphragm body, the two spacers supporting the diaphragm body on the base body, a free end formed by the diaphragm body projecting beyond one of the two spacers, a cavity formed between the diaphragm body and the base body in a region between the two spacers so that the diaphragm body bends when a force acts on the diaphragm body in the region between the two spacers, a first electrode arranged at the free end, a second electrode arranged on the base body, and an electrical contact device which makes an electrical contact with the first and second electrode. The first and second electrode define a precision capacitance meter with a measuring capacitance which changes with an action of the force.
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subjects MEASURING
MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE
PHYSICS
TESTING
title CAPACITIVE FORCE SENSOR
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