X-RAY THIN FILM INSPECTION DEVICE

An X-ray thin film inspection device of the present invention includes an X-ray irradiation unit 40 installed on a first rotation arm 32, an X-ray detector 50 installed on a second rotation arm 33, and a fluorescence X-ray detector 60 for detecting fluorescence X-rays generated from an inspection ta...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Motono Hiroshi, Takahashi Hideaki, Higuchi Akifusa, Ogata Kiyoshi, Umegaki Shiro, Horada Katsutaka, Ito Yoshiyasu, Kinefuchi Takao, Asano Shigematsu, Kawahara Naoki, Nakano Asao, Yoshihara Sei, Yoshida Muneo, Omote Kazuhiko
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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