PRESSURE DETECTION UNIT, PRESSURE SENSOR USING THE SAME, AND METHOD OF MANUFACTURING PRESSURE DETECTION UNIT

[Solving Means] A pressure detection unit includes a base formed in a lid shape and made of ceramic, a receiving member formed in a plate shape, a diaphragm interposed between the base and the receiving member, a semiconductor type pressure detection device installed on a side of a pressure receivin...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	TAMURA Youko, AOYAMA Tomohisa, MUKAI Motohisa
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PHYSICS TESTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!